Preface
1. Principles of Micro-and Nanofabrication
1.1 Introduction
1.2 Material Removal Rates
1.3 Conclusions
1.4 Problems
References

2. Microfabrication Using X-ray Lithography
2.1 Introduction
2.2 X- ray Lithography
2.3 Synchrotron Radiation
2.4 Microfabrication Process
2.5 Methods of Resist Application
2.6 Exposure
2.7 Problems
References

3. Manufacturing High Aspect Ratio Microstructures
3.1 I ntrod uction
3.2 Dry Etching
3.3 Plasma Etching Processes
3.4 Characteristics of the Plasma
3.5 Etching of Microstructures
3.6 Micromachining High Aspect RatioMicrostructures
3.7 Micromolding
3.8 Micromolding Processes
3.9 Micromolding Tools
3.10 Micromold Design
3.11 MicromoldingApplications
3.12 Limitations of Micromolding
3.13 Fabrication of Moving Microstructures
3.14 Conclusions
3.15 Problems
References

4. Meso-micromachining
4.1 Introduction
4.2 Size Effects in Micromachining
4.3 Mechanism for Large Plastic Flow
4.4 Inhomogeneous Microstrains
4.5 Origins of the Size Effect
4.6 Meso-machining Processes
4.7 Problems
References

5. Mechanical Micromachining
5.1 Introduction
5.2 Microfluidic Systems
5.3 Theory of Micromachining
5.4 Experimental Micromachining
5.5 Micromachining Tool Design
5.6 High-Speed Air Turbine Spindles
5.7 Mechanical Design of Rotors
5.8 Discussion
5.9 Conclusions
5.10 Future Developments
5.11 Problems
References

6. Microgrinding
6.1 Introduction
6.2 Grinding Wheels
6.3 Conventional Grinding Processes
6.4 Precision Grinding Processes
6.5 Ultra Precision Grinding
6.6 Conclusions
6.7 Problems
References

7. Diamond Micro Cutting Tools
7.1 Introduction
7.2 Properties of Diamond
7.3 History of Diamond
7.4 CVD Diamond Technology
7.5 CVD Diamond Processes
7.6 Treatment of Substrate
7.7 Modification of HFCVD Process
7.8 Nucleation and Growth
7.9 Deposition on 3-D Substrates
7.10 Wear of Diamond
7.11 Time-Modulated CVD Diamond
7.12 Conclusions
7.13 Problems
References

8. Laser Micro- and NanofabricaUon
6.1 Introduction
8.2 Laser Fundamentals
8.3 Laser Microfabrication
8.4 Laser Nanofabrication
8.5 Conclusions
8.6 Problems
References

9. Micromachining Using Water Droplets
9.1 Introduction
9.2 Theory of Pulsed Liquid Impact
9.3 Impact by Water Drops
9.4 Modeling Machining Thresholds
9.5 Comparative Results
9.6 Material Removal Rates
9.7 Design of Water-Based Tools
9.8 Analysis of Space Frame
9.9 Mode Shapes of Tetrahedral Structure
9.10 Conclusions
9.11 Problems
References

10. Diamond Nanogrinding
10.1 Introduction
10.2 Piezoelectric Nanogrinding
10.3 Stress Analysis in Nanogrinding Grains
10.4 Fracture Dominated Wear Model
10.5 Nanogrinding
10.6 Porous Nanogrinding Tools
10.7 Laser Dressing of Tools
10.8 Future Directions
10.9 Problems
References

11. Nanomachining
11.1 Introduction
11.2 Nanometric machining
11.3 Theoretical Basis of Nanomachining
11.4 Implementation
11.5 Conclusions
11.6 Problems
References

12. Micro- and Nanomanufacturing
12.1 Introduction
12.2 Micromanufacturing
12.3 Nanomanufacturing
12.4 Commercialization Issues of Micro and Nanotechnologies
12.5 Future Developments
12.6 Problems
References
Subject Index