In the field of micro/nano micromanipulator technology, flexure-based microgripper and positioning mechanism based on piezoelectric transducer (PZT) driven with high positioning precision and large workspace are really desirable for the realization of high-performance micro/nano scale operation, micro electromechanical system (MEMS), biomedicine, atomic force microscope (AFM) scanner, microassembly, and biological cell automatic micro-injection. In these applications, piezo-actuated compliant mechanisms have been widely applied to ultra high accuracy operation because of their advantages of no friction, no backlash, vacuum compatibility, no need assembling, and easy to be fabricated. In order to meet this requirement, several novel large-stroke compliant micro-grippers and positioning mechanisms are developed and presented in this book.